ITO target

Table 1:

 

Item

Specification

composition

In2O3:SnO2=90:10(wt%),to match customers’requirements

purity

4N(see schedule)

relative density

≥99.3%(theoretical density is 7.15g/cm3

resistivity

≤1.8Ω·mm2/m

deoxygenation coefficient

≤0.5%

physical specifications

flaky or other shape, its size and the deviation from the two sides agreed to supply and demand

appearance

exterior color uniformity; surface smooth, free of cracks, chipping, and without any inclusions and contaminants

internal defects

internal no cracks, no exotic matter

 

Schedule:

 

Impurities(×10-6)less than                         unit:wt%

Fe

Pb

Zn

Ni

Cu

Cd

Al

Si

Ca

Mg

15

10

10

5

5

5

15

15

15

5

 
 
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